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Nonlinear Control Design for a Plasma Process

Iordanov, Petar and Ringwood, John and Doherty, Sean (2005) Nonlinear Control Design for a Plasma Process. 44th IEEE Conference on Decision and Control and the European Control Conference, 2005. pp. 2380-2385.

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Abstract

This paper presents a nonlinear control design for a first-principles based model of an argon plasma process. In this study, a Hammerstein-type structure was employed as a basis for a feedback control design. Artificial neural networks were used to accurately model the static nonlinearity. In the developed Hammerstein model, variations in the process dynamics were accounted for by considering parametric uncertainty. A control design strategy based on μ-synthesis was applied to deliver good tracking performance and disturbance rejection.

Item Type: Article
Keywords: Nonlinear Control Design; Plasma Process;
Subjects: Science & Engineering > Electronic Engineering
Item ID: 1951
Depositing User: Professor John Ringwood
Date Deposited: 25 May 2010 15:48
Journal or Publication Title: 44th IEEE Conference on Decision and Control and the European Control Conference, 2005
Publisher: IEEE
Refereed: Yes
URI:

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