Abstract

The use of first-principles based models of plasma processes is discussed in this paper. Such processes are essentially highly nonlinear, feature complex interactions and are difficult to analyse. As an illustration of the nature of firstprinciple based models, a characterisation of a simple plasma process is presented in this work. Quantification of the nonlinearity, in terms of steady-state and dynamics behavior, is carried out for the studied process. The use of Hammerstein model and its applicability to the plasma process is also investigated. A basic stabilising controller for the simple plasma process is designed and its performance is analysed.