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Gaussian Process Regression for Virtual Metrology of Plasma Etch

Lynn, Shane and Ringwood, John and MacGearailt, Niall (2012) Gaussian Process Regression for Virtual Metrology of Plasma Etch. In: Irish Signals and Systems Conference 2010, June, 2010, Cork.

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Abstract

Plasma etch is a complex semiconductor manufacturing process in which material is removed from the surface of a silicon wafer using a gas in plasma form. As the process etch rate cannot be measured easily during or after processing, virtual metrology is employed to predict the etch rate instantly using ancillary process variables. Virtual metrology is the prediction of metrology variables using other easily accessible variables and mathematical models. This paper investigates the use of Gaussian process regression as a virtual metrology modelling technique for plasma etch data.

Item Type: Conference or Workshop Item (Paper)
Keywords: Plasma etch; virtual metrology; Gaussian process regression;
Subjects: Science & Engineering > Electronic Engineering
Item ID: 3617
Depositing User: Professor John Ringwood
Date Deposited: 01 May 2012 14:04
Refereed: Yes
URI:

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