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NUI Maynooth ePrints and eTheses Archive |
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NUI Maynooth ePrints and eTheses Archive |
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Author: Butler, Shane W.Number of items: 1.
Butler, Shane W. and Ringwood, John V. and MacGearailt, Niall (2009) Prediction of Vacuum Pump Degradation in Semiconductor Processing. In: SAFEPROCESS'09, 7th IFAC Symposium on Fault Detection, Supervision and Safety of Technical Processes, June 30 - July 3 2009, Barcelona. This list was generated on Thu May 24 19:00:42 2012 IST. |
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