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NUI Maynooth ePrints and eTheses Archive |
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NUI Maynooth ePrints and eTheses Archive |
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Author: Ma, Beibei MaNumber of items: 1.
Ringwood, John V. and Lynn, Shane and Bacelli, Giorgio and Ma, Beibei Ma and Ragnoli, Emanuele and McLoone, Sean (2010) Estimation and Control in Semiconductor Etch: Practice and Possibilities. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 23 (1). ISSN 0894-6507 This list was generated on Fri May 25 19:03:39 2012 IST. |
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