	NUI Maynooth ePrints and eTheses Archive
	Home \| About \| Browse \| Search \| Register \| User Area \| Help \| As Gaeilge\| Statistics\| eTheses

Thesis author: Lynn, Shane

Number of items: 1.

PhD

Lynn, Shane (2011) Virtual metrology for plasma etch processes. PhD thesis, National University of Ireland Maynooth.

This list was generated on Sun May 19 15:26:45 2013 IST.

NUI Maynooth ePrints and eTheses Archive is maintained by the Library.

Contact the site administrator at: s.redmondmaloco@nuim.ie